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Microsupport newsletter Vol.10

Why don’t you save chamber time for in situ lift out of FIB-SEM?

EX SITU FIB LIFT-OUT WITH AXIS PRO, A BENCHTOP MICROMANIPULATOR FOR TEM : Why don’t you save chamber time for in situ lift out of FIB-SEM?

Thin sections for TEM measurements are typically produced by Focused Ion Beam (FIB) techniques inside a Scanning Electron Microscope (SEM). These FIB foils are 100-200 nm thick and must be handled with great care for transfer to a TEM grid. This transfer (called lift-out) is often performed with a micromanipulator inside the SEM. These in situ systems are an industry standard and work well.
However, the in situ FIB foil transfer can take up quite a bit of chamber time that could be used for other processes.

The Axis Pro, micromanipulator can transfer FIB foils to TEM grids outside (ex situ) the SEM chamber.
For ex situ lift-out, a solid glass probe (1-10 μm tip diameter) is used for transfer. A glass probe is positioned on one arm and approaches the FIB foil on the surface. The foil is held on to the glass probe through electrostatic adhesion and the probe is then moved to the TEM grid where the FIB foil is deposited.