High-Precision Rotator with AxisPro 2019 software control

・Sample: Electronic device
・Tool: Electric High-Precision Rotator + AxisPro
・Application: FIB lift out and transfer
・Features: Software-enabled XYZθ coordinate registration.

Supplementary Information

Keyword

Electric High-Precision Rotator

FIB Lamella Lift-Out

Wafer

Silicon Wafer

Electronic Components

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Resolves issues related to particulate sampling.
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